In addition to conventional sputtering systems for the deposition of hard coatings, Vacotec also offers MoS₂ sputtering systems used to improve the sliding properties of components.

A MoS₂ sputtering system for example has the following features:

• Deposition of low-friction coatings
• Three magnetron evaporators
• DC-magnetron power supplies
• Pulsed bias supply
• Individual controllable mass flow controllers
• High-vacuum pumping system, consisting of: rotary vane pump, Roots pump and turbo molecular pump
• Cold trap
• Depossition at temperatures < 200 °C
• Similar process steps to an Arc-PVD coating process (pumping, heating, etching / cleaning, coating, cooling)